Steven Marks Engineer

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Information about Steven Marks Engineer
Career

Published on March 14, 2009

Author: guestb541e

Source: slideshare.net

Description

Job skills, education, experience

Steven Marks Hands-on Process Engineering Process Integration SPC/DOE Expertise Solar & IC Industries – can transition to other industries Steven (dot) Marks33 (at) comcast (dot) net

Overview I possess a variety of problem solving, work ethic and processing skills. Education Industrial experience R&D Pilot Lines 5 Factory startups: high volume production Statistical skills Teamwork skills Communication skills

I possess a variety of problem solving, work ethic and processing skills.

Education

Industrial experience

R&D

Pilot Lines

5 Factory startups: high volume production

Statistical skills

Teamwork skills

Communication skills

Education I grew up in Indiana and would like to return to Midwest where I have a lot of relatives. I received my BS in Chemistry with Honors in Chemistry from Indiana University. “ Hoosier Scholar” – Academic Scholarship “ The Outstanding Senior” – So. Ind. Sector of the ACS Worked in lab of Prof. Ewing on spectroscopy and structure of charge transfer complexes and van der Waals molecules. 51 hours of chemistry, 27 hours of mathematics, 25 hours of physics (scale is 122 hours to graduate). I received my Ph.D. in Physical Chemistry from Cal Berkeley . In addition to Chemistry-required coursework I took 2 years of solid state physics – so I understand band gaps and things of that nature. Univ. of Cal. Regents Fellow. Thesis on spectroscopy of organic crystals. Finished in four years – work ethic. In addition, I have a 6-course, 18-hour Certificate in C++ programming from SE Minn. State Tech College (online) – so could plunge into Labview or Matlab if I had to.

I grew up in Indiana and would like to return to Midwest where I have a lot of relatives.

I received my BS in Chemistry with Honors in Chemistry from Indiana University.

“ Hoosier Scholar” – Academic Scholarship

“ The Outstanding Senior” – So. Ind. Sector of the ACS

Worked in lab of Prof. Ewing on spectroscopy and structure of charge transfer complexes and van der Waals molecules.

51 hours of chemistry, 27 hours of mathematics, 25 hours of physics (scale is 122 hours to graduate).

I received my Ph.D. in Physical Chemistry from Cal Berkeley .

In addition to Chemistry-required coursework I took 2 years of solid state physics – so I understand band gaps and things of that nature.

Univ. of Cal. Regents Fellow. Thesis on spectroscopy of organic crystals.

Finished in four years – work ethic.

In addition, I have a 6-course, 18-hour Certificate in C++ programming from SE Minn. State Tech College (online) – so could plunge into Labview or Matlab if I had to.

Industrial Experience Overview First – then functional skills Worked for 4 companies that made semiconductor or solar cells and 1 semiconductor equipment company. Been through 5 factory startups and one ramp-up . Significant Patent and Publication list. TEXAS INSTRUMENTS : MTS – spectroscopist – worked on characterizing HgCdTe IR detectors, C and O in Si, Aluminum electromigration. AMD: Depending on Fab I worked on: wet etching/cleans, plasma processing, silicon starting materials, photolith., and was “assignee” to SEMATECH (R&D consortium). I had about 8 titles in 12 ½ years.

Worked for 4 companies that made semiconductor or solar cells and 1 semiconductor equipment company.

Been through 5 factory startups and one ramp-up .

Significant Patent and Publication list.

TEXAS INSTRUMENTS : MTS – spectroscopist – worked on characterizing HgCdTe IR detectors, C and O in Si, Aluminum electromigration.

AMD: Depending on Fab I worked on: wet etching/cleans, plasma processing, silicon starting materials, photolith., and was “assignee” to SEMATECH (R&D consortium). I had about 8 titles in 12 ½ years.

Industrial Experience – p2 Overview First – then functional skills Integrated Device Technology: Gas cabinet ordering, wet bench specification, plasma and wet etch section head, process integration. Test wafer recycling coordinator. Tegal Corp: Advanced toolset demo-lab, process installation, tech. liaison to Korea and Japan. Team leader for major modification of tool-set (heated electrode). Emcore: Was in a group “Zia” within Photovoltaics that worked on a classified, unique solar cell. My responsibilities were primarily sputtering and plating. I got pulled into photo, photomask design, integration, resist stripping. I learned to use SEM.

Integrated Device Technology: Gas cabinet ordering, wet bench specification, plasma and wet etch section head, process integration. Test wafer recycling coordinator.

Tegal Corp: Advanced toolset demo-lab, process installation, tech. liaison to Korea and Japan. Team leader for major modification of tool-set (heated electrode).

Emcore: Was in a group “Zia” within Photovoltaics that worked on a classified, unique solar cell. My responsibilities were primarily sputtering and plating. I got pulled into photo, photomask design, integration, resist stripping. I learned to use SEM.

Industrial Experience – p3 Overview First – then functional skills Broad Scope of Processing Technical Skills : Materials Characterization Plasma Processing Metallization Photolithography Integration Electroplating Wet Processing Tool Spec  Install  Qual  Optimize  Specs  Pass QA Audits I have done it over 100 times!!!!!!! Statistical Skills – will elaborate later. Teamwork skills – will elaborate. Work ethic – will elaborate.

Broad Scope of Processing Technical Skills :

Materials Characterization

Plasma Processing

Metallization

Photolithography

Integration

Electroplating

Wet Processing

Tool Spec  Install  Qual  Optimize  Specs  Pass QA Audits I have done it over 100 times!!!!!!!

Statistical Skills – will elaborate later.

Teamwork skills – will elaborate.

Work ethic – will elaborate.

Industrial Experience – p4 Functional skills Innovation : I know how to generate intellectual property – even when working on production lines. Classified Patent paperwork submitted at Emcore (PV device). "Cobalt Silicide Etch Process and Apparatus" Steven Marks (Principle Inventor), et al. International Patent WO 01/41189 A2,  June, 2002, 48 pages. "Cobalt Silicide Etch Process and Apparatus" Steven Marks (Principle Inventor), et al. US Patent 6,391,148 B2, May, 2002.  14 pages. “ Silicide etching process and apparatus for etching silicide and other materials”    INVENTOR(S)- Marks, Steven; Jerde, Leslie G.; Deornellas, Stephen P.   2001-06-07    48 page(s)    PATENT NUMBER-0141189    “ Process for smoothing a non-planar surface”    PAT   00-00-87   04655874   (sole) INVENTOR – Marks, Steven   PATENT NUMBER- 04655874    PATENT APPLICATION NUMBER- 759625    DATE FILED- 1985-07-26    PATENT DATE- 1987-04-07  “ Dragon Slayer Award” (AMD Engineer of month) for solving collector-emitter shorting associated with a deep trench isolation process.   Innovative way of lowering the time for a wet clean and reducing particles of a plasma etch tool (SEMATECH report)

Innovation : I know how to generate intellectual property – even when working on production lines.

Classified Patent paperwork submitted at Emcore (PV device).

"Cobalt Silicide Etch Process and Apparatus" Steven Marks (Principle Inventor), et al. International Patent WO 01/41189 A2,  June, 2002, 48 pages.

"Cobalt Silicide Etch Process and Apparatus" Steven Marks (Principle Inventor), et al. US Patent 6,391,148 B2, May, 2002.  14 pages.

“ Silicide etching process and apparatus for etching silicide and other materials”    INVENTOR(S)- Marks, Steven; Jerde, Leslie G.; Deornellas, Stephen P.   2001-06-07    48 page(s)    PATENT NUMBER-0141189   

“ Process for smoothing a non-planar surface”    PAT   00-00-87   04655874   (sole) INVENTOR – Marks, Steven   PATENT NUMBER- 04655874    PATENT APPLICATION NUMBER- 759625    DATE FILED- 1985-07-26    PATENT DATE- 1987-04-07 

“ Dragon Slayer Award” (AMD Engineer of month) for solving collector-emitter shorting associated with a deep trench isolation process.  

Innovative way of lowering the time for a wet clean and reducing particles of a plasma etch tool (SEMATECH report)

Industrial Experience – p5 Functional skills STATISTICAL SKILLS : A key strength with me. AMD: Self-taught with “Practical Experimental Designs” applied to Poly Fuse etch uniformity and C-E shorting on deep-trench isolation process. Sent to 3 day DuPont course on Designed Experiments. SEMATECH Assignee: TRAINING: 40 hours statistics/SPC 40 hours DOE 1, then experiments under statistician supervision. 40 hours DOE 2, then more experiments. Wrote 2 reports that contained both SPC and DOE. AMD: further training in SPC and DOE. Applied DOE to an Oxide Etch Process. IDT: further SPC and DOE training. Used extensive DOE methodology to solve Tegal: Conducted 40 demonstrations – virtually all with DOE methodology. Emcore: Optimized plating process for stress and classified parameter. Taught class on DOE. Optimized NiV sputtering process for 90% reduction of stress. Took two courses from JMP.  

STATISTICAL SKILLS : A key strength with me.

AMD: Self-taught with “Practical Experimental Designs” applied to Poly Fuse etch uniformity and C-E shorting on deep-trench isolation process. Sent to 3 day DuPont course on Designed Experiments.

SEMATECH Assignee:

TRAINING: 40 hours statistics/SPC

40 hours DOE 1, then experiments under statistician supervision.

40 hours DOE 2, then more experiments.

Wrote 2 reports that contained both SPC and DOE.

AMD: further training in SPC and DOE. Applied DOE to an Oxide Etch Process.

IDT: further SPC and DOE training. Used extensive DOE methodology to solve

Tegal: Conducted 40 demonstrations – virtually all with DOE methodology.

Emcore: Optimized plating process for stress and classified parameter.

Taught class on DOE.

Optimized NiV sputtering process for 90% reduction of stress.

Took two courses from JMP.

 

Real Life Example at a multijunction solar cell company: Stress Reduction in a sputtered metallic Film using N2 addition; Pulsed Power and Pressure Control Interacting Terms

Teamwork Skills SEMATECH and AMD really valued teamwork and had very specific training (meeting management, listening, constructive criticism). Member of AMD’s Silicon committee – then co-chairman. We specified and audited our starting material for AMD. Led Tegal’s effort to produce a heated electrode (RF, mechanical, process, sales, customer). On NUMEROUS problem solving teams – I tend to get pulled in as I have seen and solved a variety of problems.

SEMATECH and AMD really valued teamwork and had very specific training (meeting management, listening, constructive criticism).

Member of AMD’s Silicon committee – then co-chairman. We specified and audited our starting material for AMD.

Led Tegal’s effort to produce a heated electrode (RF, mechanical, process, sales, customer).

On NUMEROUS problem solving teams – I tend to get pulled in as I have seen and solved a variety of problems.

Teamwork Skills -2 Tegal’s VP of Eng. Wrote this about me. Without getting bogged down in technical details, Tegal needed to make a major product improvement called a “heated electrode.” This assembly was to be installed in an already existing Tegal tool called a plasma etcher, and we needed to get to an aggressive temperature of 500OC – a very challenging performance specification. We had Steve lead the entire team to get this product to market. The team was very cross-functional, including him representing process engineering (because of his chemistry and physics skills), purchasing agents, marketing and sales, mechanical engineering and RF (Radio Frequency) electrical engineering. There was an overall objective of getting this to a customer in Japan by September 30, 2001. He had to organize the entire project including being part of the negotiating process with the Japanese customer, establishing project goals and deadlines, and running the entire project on a day-to-day basis. So while Steve was not an expert in purchasing, mechanical engineering, or RF engineering, he was able to coordinate the efforts of all to make sure the project got done on schedule with the desired outcome . Steve established an espirit de corps with the team including coming up with a catchy internal name and logo for the project: INFERNO (because of the very high temperature). So, on this project he was indeed able to express himself clearly in all aspects. He communicated clearly with the customer, the sales force, management and his project team both orally and in written communications. He organized his own duties as well as that of the larger team, and established and chaired periodic meetings to ensure everything stayed on track – which it did!

Without getting bogged down in technical details, Tegal needed to make a major product improvement called a “heated electrode.” This assembly was to be installed in an already existing Tegal tool called a plasma etcher, and we needed to get to an aggressive temperature of 500OC – a very challenging performance specification. We had Steve lead the entire team to get this product to market. The team was very cross-functional, including him representing process engineering (because of his chemistry and physics skills), purchasing agents, marketing and sales, mechanical engineering and RF (Radio Frequency) electrical engineering. There was an overall objective of getting this to a customer in Japan by September 30, 2001. He had to organize the entire project including being part of the negotiating process with the Japanese customer, establishing project goals and deadlines, and running the entire project on a day-to-day basis. So while Steve was not an expert in purchasing, mechanical engineering, or RF engineering, he was able to coordinate the efforts of all to make sure the project got done on schedule with the desired outcome . Steve established an espirit de corps with the team including coming up with a catchy internal name and logo for the project: INFERNO (because of the very high temperature).

So, on this project he was indeed able to express himself clearly in all aspects. He communicated clearly with the customer, the sales force, management and his project team both orally and in written communications. He organized his own duties as well as that of the larger team, and established and chaired periodic meetings to ensure everything stayed on track – which it did!

Communication Skills I clearly and unambiguously write tool acceptance specs, process qualification reports, tool acceptance reports. I have 23 papers – about half I am the primary author. I wrote 40 lab demo reports while at Tegal. I have given about 6 conference papers. I have been the lead engineer for QA audits about 8 times. I have formally presented to customers about 30 times.

I clearly and unambiguously write tool acceptance specs, process qualification reports, tool acceptance reports.

I have 23 papers – about half I am the primary author.

I wrote 40 lab demo reports while at Tegal.

I have given about 6 conference papers.

I have been the lead engineer for QA audits about 8 times.

I have formally presented to customers about 30 times.

Work Ethic Dates back to when my family had a struggling retail business in Indiana and the kids had to work at the store. Merrill H., VP at AMD; George L. VP at Tegal; Ken Mc. at IDT and others can attest to my work ethic. NO ONE has ever complained about my work ethic. I am hands-on and enjoy solving problems and improving processes.

Dates back to when my family had a struggling retail business in Indiana and the kids had to work at the store.

Merrill H., VP at AMD; George L. VP at Tegal; Ken Mc. at IDT and others can attest to my work ethic.

NO ONE has ever complained about my work ethic.

I am hands-on and enjoy solving problems and improving processes.

Work Ethic – p2 George L, VP When the in-house version of “INFERNO” was on-line, Steve displayed exemplary work-ethic by working weekends and long hours. He worked 40 straight days until I relieved him by assigning him a technician to help on weekends. He developed customer-specific processes for this new equipment and then flew to Japan himself to instruct the customer on how to use the tool and processes properly. Once back in Petaluma he successfully demonstrated this product multiple times to other prospective customers, which led to additional sales opportunities and joint publications.

When the in-house version of “INFERNO” was on-line, Steve displayed exemplary work-ethic by working weekends and long hours. He worked 40 straight days until I relieved him by assigning him a technician to help on weekends. He developed customer-specific processes for this new equipment and then flew to Japan himself to instruct the customer on how to use the tool and processes properly. Once back in Petaluma he successfully demonstrated this product multiple times to other prospective customers, which led to additional sales opportunities and joint publications.

Learning New Skills I realize that any new position would mean I would have to learn a lot; I would ask questions and study on my own time. In my last position I learned within 2 ½ years: Scanning Electron Microscopy (SEM-Hitachi) Sputtering Pulsed Plating Bow measurements JMP for statistics (Previously RS1/Discover) Rudimentary photomask design (L-Edit from Tanner) Photoresist track management system (programmed)

I realize that any new position would mean I would have to learn a lot; I would ask questions and study on my own time.

In my last position I learned within 2 ½ years:

Scanning Electron Microscopy (SEM-Hitachi)

Sputtering

Pulsed Plating

Bow measurements

JMP for statistics (Previously RS1/Discover)

Rudimentary photomask design (L-Edit from Tanner)

Photoresist track management system (programmed)

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