SmalTec Micromachining Advancements

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Information about SmalTec Micromachining Advancements
Business

Published on January 9, 2010

Author: smaltec

Source: slideshare.net

Description

SmalTec International is the world’s leading manufacturer of micromachining equipment for aerospace, communications, medical, automotive, optics, nanotechnology and other innovative industries.

Micro EDM Technology Advancements

Outline Current condition of Micro-EDM Advancements Applications review Holes Slots 3D features 4th axis apps High aspect ratio 33:1 125 um diameter Metrology Copyright © SmalTec International

Current condition of Micro-EDM

Advancements

Applications review

Holes

Slots

3D features

4th axis apps

High aspect ratio

33:1

125 um diameter

Metrology

Copyright © SmalTec International Dimensions W, L, H 710 x 835 x 810 mm Weight 275 Kg / 800 Lbs XY axis range 200 x 200 mm Z axis range 100 mm Position resolution 0.1  m, glass scale Mandrel rotation ~6,000 rpm Accuracy 10 mm : 1  m 100 mm : 5  m Work piece tank 350 x 305 mm Work Piece Weight ~7.5 kg Max * Voltage 110  10V AC 50/60 Hz, 1kVA EM203 Specifications Micro-EDM: EM203 and GM703 Dimensions W, L, H 500 x 500 x 565 mm Weight 125 Kg / 300 Lbs XY axis range 50 x 50 mm Z axis range 70 mm Position resolution 10 nm, glass scale Mandrel rotation ~6,000 rpm Accuracy 10 mm : 30 nm 50 mm : 170 nm Work piece tank 150 x 150 mm Work Piece Weight ~1.5 kg Max * Voltage 110  10V AC 50/60 Hz, 1kVA GM703 Specifications www.SmalTec.com

Dimensions W, L, H

710 x 835 x 810 mm

Weight 275 Kg / 800 Lbs

XY axis range 200 x 200 mm

Z axis range 100 mm

Position resolution 0.1  m, glass scale

Mandrel rotation ~6,000 rpm

Accuracy 10 mm : 1  m

100 mm : 5  m

Work piece tank 350 x 305 mm

Work Piece

Weight ~7.5 kg Max *

Voltage 110  10V AC

50/60 Hz, 1kVA

Dimensions W, L, H

500 x 500 x 565 mm

Weight 125 Kg / 300 Lbs

XY axis range 50 x 50 mm

Z axis range 70 mm

Position resolution 10 nm, glass scale

Mandrel rotation ~6,000 rpm

Accuracy 10 mm : 30 nm

50 mm : 170 nm

Work piece tank 150 x 150 mm

Work Piece

Weight ~1.5 kg Max *

Voltage 110  10V AC

50/60 Hz, 1kVA

Spark Technology Smallest spark size in the industry Less than 0.5 micron spark gap Spark Frequency 5 ns duration Based upon R/C circuit Copyright © SmalTec International

Smallest spark size in the industry

Less than 0.5 micron spark gap

Spark Frequency 5 ns duration

Based upon R/C circuit

Copyright © SmalTec International Basics Behind the Technology Energy Discharge Relationship E= ½ CV² Roughing Energies: 100v/3300pF 16,500 nJ 90v/220pF 891 nJ Final Energies: 80v/100pF 320 nJ 70v/20pF 49 nJ Measuring Energies: 10V/10pF 500 pJ 2V/10pF 20 pJ 20pJ = 20*10 -12 Joules 1 AA Battery = 1x10 3 Joules 1 Spark Event = 5*10 -9 Seconds 1 AA Battery could power a 20pJ spark for 70 hours! 5ns pulse width Highest Frequency in the Industry

Edge Comparison Copyright © SmalTec International Energy – 49 nJ 5 ns Nearest Competitor Energy – 12,700 nJ 180 ns Recast 10 um scale Magnification

Tooling is Critical Tools made utilizing WEDG technology Copyright © SmalTec International

Tools made utilizing WEDG technology

WEDG Machining Principles of WEDG No mechanical contact, cutting force is negligible Precision wire runs along the supporting guide, no vibration of wire Simple structure, easily installed on the machine Electrodes with various cross-sectional shapes can be created using the NC control Tool refresh or creation during the part making process Ability to add macros into the G-code program to retool at specific points or certain conditions during the part processing program Copyright © SmalTec International

Principles of WEDG

No mechanical contact, cutting force is negligible

Precision wire runs along the supporting guide, no vibration of wire

Simple structure, easily installed on the machine

Electrodes with various cross-sectional shapes can be created using the NC control

Tool refresh or creation during the part making process

Ability to add macros into the G-code program to retool at specific points or certain conditions during the part processing program

Applications That Work Well Inkjet nozzle plates Diesel Fuel injector SEM/FIB aperture disks Wave guide channel Micro Mold Medical tooling Plastic gears Fiber optic connector Fiber extrusion dies Micro wire guide AFM Probe components Precision stamping DNA pins MEMS device repair Precision punch Micro cooling fins Micro springs Display products Custom spray heads Micro pins Air pressure relieve valves Micro stress gauges Water jet orifice disks Material tensile test piece Alignment targets Lens molding PCD Scribing Wheel High aspect Hole Copyright © SmalTec International

Inkjet nozzle plates

Diesel Fuel injector

SEM/FIB aperture disks

Wave guide channel

Micro Mold

Medical tooling

Plastic gears

Fiber optic connector

Fiber extrusion dies

Micro wire guide

AFM Probe components

Precision stamping

DNA pins

MEMS device repair

Precision punch

Micro cooling fins

Micro springs

Display products

Custom spray heads

Micro pins

Air pressure relieve valves

Micro stress gauges

Water jet orifice disks

Material tensile test piece

Alignment targets

Lens molding

PCD Scribing Wheel

High aspect Hole

Applications That Work Well Inkjet nozzle plates Diesel Fuel injector SEM/FIB aperture disks Wave guide channel Micro Mold Medical tooling Plastic gears Fiber optic connector Fiber extrusion dies Micro wire guide AFM Probe components Precision stamping DNA pins MEMS device repair Precision punch Micro cooling fins Micro springs Display products Custom spray heads Micro pins Air pressure relieve valves Micro stress gauges Water jet orifice disks Material tensile test piece Alignment targets Lens molding PCD Scribing Wheel High aspect Hole Copyright © SmalTec International “ SmalTec has done a great job in bringing Micro-EDM out of the niche applications into a machine shop process… [and] partnering with us to develop new applications” C.N. DeVore, Research Scientist , 3M Corporation

Inkjet nozzle plates

Diesel Fuel injector

SEM/FIB aperture disks

Wave guide channel

Micro Mold

Medical tooling

Plastic gears

Fiber optic connector

Fiber extrusion dies

Micro wire guide

AFM Probe components

Precision stamping

DNA pins

MEMS device repair

Precision punch

Micro cooling fins

Micro springs

Display products

Custom spray heads

Micro pins

Air pressure relieve valves

Micro stress gauges

Water jet orifice disks

Material tensile test piece

Alignment targets

Lens molding

PCD Scribing Wheel

High aspect Hole

Inkjet Nozzle Plates Copyright © SmalTec International Material: SS Varieties Top diameter :58 μ m Tungsten Top diameter :32 μ m Tungsten Electrode

SEM/FIB Apertures Copyright © SmalTec International 5 um diameter Thickness: 50um Material: Platinum 5 um X 45 um Thickness: 100um Material: Platinum

Micro Wire Guide Copyright © SmalTec International 50 um Radius 10 mm Diameter 6 mm Material : SS 421

Copyright © SmalTec International Panasonic Φ100 um L= 500 um Cu sheet ( thickness 18 um ) Precision Punch Material : Copper

Micro Pins Copyright © SmalTec International Material : SS Music Wire

Material Tensile Test Piece Copyright © SmalTec International Material : SS 304

High Aspect Hole Copyright © SmalTec International Entry 132 um Exit 125 um 4.40 mm Tool path Material : Carbide

Process Specific Applications Removal Rates Dielectric oil Different fluids Viscosity Dielectric strength Specific gravity Cleanliness Debris Additives DiWater Purity 16-18 M Ω -cm Achieve high resistivity UV photo-oxidation of 185 nm Control micro bacterial organisms Copyright © SmalTec International *Ultrapure deionized water has a theoretical maximum resistivity of 18.31 MΩ·cm and a theoretical minimum conductivity of .0545 microsiemens(µS) /cm, compared to around 15 kΩ·cm and 70 (µS)/cm for tap water. 0.788 high 1.87 cSt EDM 185 0.793 high 2.8 cSt Ionoplus 3000 0.82 high 3.4 cSt EDM 30 Specific gravity Dielectric strength Viscosity Fluid name cSt=centistokes

Removal Rates

Dielectric oil

Different fluids

Viscosity

Dielectric strength

Specific gravity

Cleanliness

Debris

Additives

DiWater

Purity

16-18 M Ω -cm

Achieve high resistivity

UV photo-oxidation of 185 nm

Control micro bacterial organisms

Function of the Dielectric Insulation One important function of the dielectric is to insulate the workpiece from the electrode. The disruptive discharge must take place across a spark gap which is as narrow as possible. In this way efficiency and accuracy are improved. Ionization As quickly as possible optimum conditions for the production of an electrical field must be created and then a spark path must be provided. After the impulse the spark path must be de-ionized quickly so that the next discharge can be made. The dielectric ought to constrict the spark path as much as possible, so that high energy density is achieved, which increases discharge efficiency at the same time. Cooling The spark has a temperature of thousands of degrees C when it punctures the workpiece and so the dielectric must cool both the electrode and the workpiece. Overheating of the electrode must be avoided, so that excessively high electrode wear cannot occur. It must be possible for the metal gases which develop during spark erosion to condense in the liquid. Removal of Waste Particles Metal particles that have been eroded away must be removed from the area of erosion by the dielectric to avoid disruptions in the process. Copyright © SmalTec International

Insulation

One important function of the dielectric is to insulate the workpiece from the electrode. The disruptive discharge must take place across a spark gap which is as narrow as possible. In this way efficiency and accuracy are improved.

Ionization

As quickly as possible optimum conditions for the production of an electrical field must be created and then a spark path must be provided. After the impulse the spark path must be de-ionized quickly so that the next discharge can be made. The dielectric ought to constrict the spark path as much as possible, so that high energy density is achieved, which increases discharge efficiency at the same time.

Cooling

The spark has a temperature of thousands of degrees C when it punctures the workpiece and so the dielectric must cool both the electrode and the workpiece. Overheating of the electrode must be avoided, so that excessively high electrode wear cannot occur. It must be possible for the metal gases which develop during spark erosion to condense in the liquid.

Removal of Waste Particles

Metal particles that have been eroded away must be removed from the area of erosion by the dielectric to avoid disruptions in the process.

Metrology Capabilities GM703/EM203 Platform Advantages Coordinated Measurement Machine High Aspect Ratio Measurements In Situ Metrology Process Refinement Non-Contact / Non-Destructive Standard and non-Standard Probe Shapes Reduction of Wasted Parts and Time Copyright © SmalTec International

GM703/EM203 Platform Advantages

Coordinated Measurement Machine

High Aspect Ratio Measurements

In Situ Metrology

Process Refinement

Non-Contact / Non-Destructive

Standard and non-Standard Probe Shapes

Reduction of Wasted Parts and Time

Tungsten CMM Probe Copyright © SmalTec International 35 micron radius tip Radius formed by PCD tool diameter Future: stem lengthened with μ EDM process

Tungsten CMM Probe Copyright © SmalTec International 35 micron radius tip

Tungsten Carbide CMM Probe Copyright © SmalTec International 75 micron diameter tip 50 micron post width 1 mm post length

Copyright © SmalTec International Impact on Gold Surface Surface Mapping 200A of E-Beam Evaporated Gold on a Glass Slide Gold Glass

Surface Mapping of Gold Copyright © SmalTec International X Axis (mm) Z Axis 40v 30v 20v 10v 5v 2v 1 um

Copyright © SmalTec International No impact on surface using less than 10v and 1opF (<500pJ) Impact on Gold Surface

In Closing Today’s Small Technology Industry is advancing at a rapid rate Parts are getting smaller and smaller Manufacturer’s of micro machining equipment need to adapt and offer greater flexibility The part is the central focus point and needs to be located on a machine tool and not be removed until completed Copyright © SmalTec International “ Mechanical and electrical functions are getting more and more concentrated in a great part of industrial products…Micro-Machining is one of the important technologies which support this tendency” - Dr. T. Masuzawa

Today’s Small Technology Industry is advancing at a rapid rate

Parts are getting smaller and smaller

Manufacturer’s of micro machining equipment need to adapt and offer greater flexibility

The part is the central focus point and needs to be located on a machine tool and not be removed until completed

The Future Starts Here … For more information, please contact or visit us: SmalTec International 1998 Ohio Street Ste 200 Lisle, IL 60532 p: 630.364.1788 e: info@smaltec.com w: www.SmalTec.com

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