Published on March 5, 2014
SAES Packaging service making innovation happen, together
Agenda MEMS Packaging service description Facility and operations Capabilities and future prospective Choose your type of service : Fast prototyping Process developments Packaging foundry service Add‐on services RGA (Residual Gas Analysis) Outgassing Leak rate measurements Conclusions MJM 25/01/2013 2 © SAES Group making innovation happen, together
SAES Packaging Service description MEMS discrete (die‐level) vacuum packaging Ceramic packaging Metal packaging Getter integration Getter film deposition and pattering Sealing methods Au/Sn eutectic Glass frit soldering MJM 25/01/2013 3 making innovation happen, together
Facilities and operations Equipment Independent outgassing/forming gas system High vacuum sealing furnace Independent heating systems Rapid thermal annealing Temperature: up to 1100°C Heated plates, up to 450 x 450 mm Fast ramping of plate • Ramp up at > 3.5°C/second • Ramp down at > 2°C/second 100 steps per program Ultimate Vacuum: ~ 7 x 10‐7mbar High pressure atmosphere: up to 3 bar (abs) Operations Class 100 clean room High Throughput Flexible sealing recipes Testing Ultrasonic microscope bonding line integrity test Leak rate measurements MJM 25/01/2013 4 © SAES Group making innovation happen, together
Capabilities and future prospective Current achievements : Final packaging pressure down to 10‐3 – 10‐4 mbar range with getter integration Hermeticity level < 10‐16 mbar l /s Fast sealing process Die attach materials selections Future available services : Die attach Wire bonding MJM 25/01/2013 5 © SAES Group making innovation happen, together
Choose your type of service SAES is offering : Fast prototyping Process developments Packaging foundry service MJM 25/01/2013 6 © SAES Group making innovation happen, together
Fast prototyping Need prototypes quickly? Here are the steps SAES follows: Review packaging drawings and requirements Develop tools Perform bonding trials on empty packages Perform bonding on first prototypes Complete tests and characterizations In a reasonably short time we can make your first prototypes a thing of reality Need more fast? We can do that! We can provide effective and robust solutions MJM 25/01/2013 7 © SAES Group making innovation happen, together
Process developments Step by step process development Discussion and definition of the project goals Material selections and analysis Getter integration Preliminary packaging experiments Recipe definition and testing Recipe improvements Tests on repeatability CpK definition and key control parameters Process installation Tests and fine tuning MJM 25/01/2013 8 © SAES Group making innovation happen, together
Packaging foundry service High throughput capability Competitive costs Fast delivery Packaging components provided by customer : Ceramic container with die attached and wire bonded MEMS Au plated Kovar lid Au‐Sn Bonding preform MJM 25/01/2013 9 © SAES Group making innovation happen, together
Add‐on services SAES also offers: RGA (Residual Gas Analysis) Outgassing tests Leak rate measurements MJM 25/01/2013 10 © SAES Group making innovation happen, together
RGA MEMS samples with internal volume down to nano liter range Analysis sensitivity 10‐6 cc mbar Total pressure and gas composition Service capability : Two samples per day Standard lead time 4 weeks Fast lead time : 1 week Without getter With getter Sample 1 Q Factor (measured) Q Factor (calculated) Gas H2 Sample 5 Q Factor (measured) Q Factor (calculated) 3000 3220 Pressure Composition (mbar) 7.92E-01 81.7% Gas 500000 1.40E+07 Pressure Composition (mbar) H2 CH4 8.92E-02 9.2% CH4 3.92E-05 9.8% H2O CO N2 9.70E-04 5.53E-02 1.55E-02 0.1% 5.7% 1.6% H 2O CO N2 2.28E-05 5.7% C2H6 5.82E-03 0.6% C 2H 6 1.52E-05 3.8% C3H8 7.76E-03 0.8% C 3H 8 3.36E-05 8.4% CO2 Noble gases (He,Ar,etc...) Total 1.94E-03 0.2% CO2 Noble gases (He,Ar,etc...) Total 2.89E-04 72.3% 4.00E-04 100.0% Mean Viscosity (10-5 Pa s) 1.911 Mean Viscosity (10-5 Pa s) MJM 25/01/2013 11 © SAES Group 7.76E-04 0.1% 9.70E-01 100.0% 0.984 making innovation happen, together
Outgassing tests Material studies on outgassing properties Material vacuum compatibility assessments Material selections Material comparisons Service capability : Max sample size of 1” Max temperature treatment is 800°C Methods : 450 Static outgassing Dynamic outgassing 330 °C x 12 min 300 250 200 °C x 60 min 200 150 100 is very useful to make measurements on plastics, foams and other materials which show a high amount of gas evolved and mainly outgas water vapor 12 Bonding: 370 °C x 5 min 350 Temperature (°C) to measure the outgassing rate from metals, glasses, ceramics, and other materials which release a relatively low amount of gas MJM 25/01/2013 400 °C x 60 min 400 © SAES Group 50 0 0 20 40 60 80 100 120 140 160 180 Time (min) making innovation happen, together
Leak rate measurements The detection and measurement of very small leaks is a key factor for the assessment of device lifetime Air leak rate Ultra fine Super fine Extra fine Fine Moderate Gross The method is able to : establish whether the device is affected by a leak or not quantitatively measure the leak rate Pa·m 3/s 1.0E-14 1.0E-11 1.0E-09 1.0E-07 1.0E-05 1.0E-05 mbar·l/s < 1.0E-13 < 1.0E-10 < 1.0E-08 < 1.0E-06 < 1.0E-04 > 1.0E-04 Torr·l/s 7.5E-14 7.5E-11 7.5E-09 7.5E-07 7.5E-05 7.5E-05 Service capabilities : Sensitivity : the minimum detectable air leak rate is about 1x10‐16 mbar l/s. Whenever the leak rate is close to the system sensitivity an upper limit will be provided Standard lead time: 4 weeks Fast service lead time : 2 weeks Example Tests performed on inertial sensors The producer observed Q‐factor degradation with time for some devices MJM 25/01/2013 13 © SAES Group Device Initial presure Target pressure Volume PaGe® surface Accelerometer 0.01 mbar 0.1 mbar 0.1 mm3 2 mm2 Internal surface outgassing is neglected No getter Measured air leak rate (mbar·l/s) < 3.0E-16 6.6E-16 2.0E-14 7.5E-14 With getter Time to exceed 10 x target pressure 10 y 4.8 y 57 days 15 days >30 y >30 y 15 y 4.2 y making innovation happen, together
Conclusions Competitive advantages of SAES’ MEMS die packaging service High vacuum encapsulation Getter integration for long term stability Flexibility Fast response Competitive costs Engineering capabilities MJM 25/01/2013 14 © SAES Group making innovation happen, together
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PAULO SAES saes jornalista editor do portal na www.seguroantisequestro.com.br. São José dos Campos Area, Brazil. Insurance