Recipe 3D

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Information about Recipe 3D

Published on July 14, 2008

Author: intellisense

Source: slideshare.net

Description

RECIPE 3D is a tool for simulating RIE, DRIE and ICP etch processes

RECIPE RIE, ICP ETCH SIMULATOR

Features RECIPE 3D MultiEtch simulation RIE, ICP and Bosch Etch simulator Simulate effect of multiple etches Validated database Sidewall & etch lag simulation Experimental etch database Capability to predict important parameters Rigorous validation experiments such as etch lag and sidewall angles Real world usage Speed and accuracy Predict and fine tune etch lag, Faster than performing a real etch. Tapeout sidewall angle and footing with confidence

RSM derived etch database Response surface matrix Etch rate as a function of APC and Coil Power

Etch characterization experiments (1)

Etch characterization experiments (2)

ICP/BOSCH ETCHING

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