Recipe 3D

75 %
25 %
Information about Recipe 3D

Published on July 14, 2008

Author: intellisense



RECIPE 3D is a tool for simulating RIE, DRIE and ICP etch processes


Features RECIPE 3D MultiEtch simulation RIE, ICP and Bosch Etch simulator Simulate effect of multiple etches Validated database Sidewall & etch lag simulation Experimental etch database Capability to predict important parameters Rigorous validation experiments such as etch lag and sidewall angles Real world usage Speed and accuracy Predict and fine tune etch lag, Faster than performing a real etch. Tapeout sidewall angle and footing with confidence

RSM derived etch database Response surface matrix Etch rate as a function of APC and Coil Power

Etch characterization experiments (1)

Etch characterization experiments (2)


Add a comment

Related pages

Willkommen bei RECIPE! - Solutions for Clinical Diagnostics

Willkommen bei RECIPE! Klinische Diagnostik mit HPLC und LC-MS/MS. Komplettkits, Referenzmaterialien, HPLC-Geräte und Zubehör.
Read more

BBC Food - Recipes - 3D biscuits

Simple 3D iced biscuits inspired by Bake Off. Ours are less intricate than the contestants’ creations, but just as impressive and much easier to make!
Read more

3D Characters | Wilton - Celebrate With Wilton - Create ...

Find out about 3D characters at Wilton provides with you step-by-step instructions, videos and all the information & tips you need. Visit today!
Read more

Durable Cake for 3D and Wedding Cakes -

I have made this receipe a few times now. The first was for a 3d standing cuddly bear. My only suggestion with this mix is to NOT use the core and cook for ...
Read more

Recipes Optimized for Intel® RealSense™ 3D Camera ...

Get recipes, menus, videos, ideas about Recipes Optimized for Intel® RealSense™ 3D Camera from Food Network.
Read more

3D Minecraft Fondant Birthday Cake - HowToCookThat : Cakes ...

You can purchase fondant or make your own, fondant recipe is here. Then you will need to colour it into your greens, browns and grey. If you have not ...
Read more

3D jelly spiders and flowers dessert jello recipe

Arachnophobia or fear of spiders affects nearly one third of the population, add to that the fear of needles and this is one scary post. These flowers and ...
Read more

Recipes - University of Washington

The Autodesk Spark team has done something quite unusual in the world of commercial 3D printing companies (3D Systems and Stratasys, please take note).
Read more

3D Brownies - Kraft Recipes - Great Recipes, Dinner Ideas ...

A triple temptation of decadence—layers of brownie, cream cheese and a chocolate macadamia nut topping—make this an extra-special dessert.
Read more