Published on July 14, 2008
RECIPE RIE, ICP ETCH SIMULATOR
Features RECIPE 3D MultiEtch simulation RIE, ICP and Bosch Etch simulator Simulate eﬀect of multiple etches Validated database Sidewall & etch lag simulation Experimental etch database Capability to predict important parameters Rigorous validation experiments such as etch lag and sidewall angles Real world usage Speed and accuracy Predict and ﬁne tune etch lag, Faster than performing a real etch. Tapeout sidewall angle and footing with conﬁdence
RSM derived etch database Response surface matrix Etch rate as a function of APC and Coil Power
Etch characterization experiments (1)
Etch characterization experiments (2)
Willkommen bei RECIPE! Klinische Diagnostik mit HPLC und LC-MS/MS. Komplettkits, Referenzmaterialien, HPLC-Geräte und Zubehör.
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