advertisement

operation of a typical diffusion pumped ...

50 %
50 %
advertisement
Information about operation of a typical diffusion pumped ...
Education

Published on January 21, 2009

Author: msmurali

Source: authorstream.com

advertisement

Operation Guide : Preliminary Rotary pump Diffusion pump Rough pumping the vacuum chamber Pumping to high vacuum To remove/replace items in the chamber Shutting down the system System operation Operation Guide Preliminary : Preliminary This assumes that everything is off initially and that the chamber (bell jar) is in atmospheric pressure to start with Switch on the power Turn on water supply All the valves are closed Rotary Pump : Rotary Pump Switch on the power to rotary pump Pump will be noisy and spew oil vapor out its exhaust, when starting from atmospheric pressure The noise should subside as the vacuum improves Diffusion Pump : Diffusion Pump Open the fore-line valve to the d.P. And wait while the pirani gauge 1 is below 200 milli torr Switch on the diffusion pump heater and wait for half an hour Link Never let a hot D.P. see high or atmospheric pressure Rough Pumping the Chamber : Rough Pumping the Chamber Make sure that the air vent valve to the chamber is closed Close the fore-line valve to the diffusion pump Now open the roughing line valve Link Pressure on the pirani gauge 2 should begin to drop If O.K. Proceed to pumping the chamber to high vacuum else test for leakage Pumping to High Vacuum : Pumping to High Vacuum Close the roughing line valve Open the fore-line valve Then open the high vacuum valve Wait for few minutes then start the ion gauge (penning gauge) Wait till the gauge pressure is above 1?10-5 torr Link A good practice is to switch the gauge off and make only spot checks To Remove/replace Items in the Bell Jar : To Remove/replace Items in the Bell Jar Switch off the ion gauge Close the high vacuum valve Open chamber vent valve Wait for the chamber to rise to atmospheric pressure Raise the bell jar Remove/replace items Check bell jar sealing surface and base plate for dirt and wipe if necessary Cover the bell jar Shutting Down the System : Shutting Down the System Emergency shutdown Close all valves on the system Shut off the diffusion pump Complete shut down Remove items from the chamber and re-evacuate the chamber Switch off the gauges Leave the bell jar under vacuum Switch off power to diffusion pump Run the rotary pump with fore-line valve open (cooling) Close the fore-line valve leaving d.P. Under vacuum Switch off the rotary pump Slide 9:  If you can’t get the chamber down to 200 milli torr or less in about 15-20 minutes, there is most likely a leak Close the roughing valve and reopen the fore-line valve and arrange to test the leakage Return

Add a comment

Related presentations

Related pages

The Complete Dummy's Guide to Operation of a Typical ...

Basics 2:The Complete Dummy's Guide to Operation of a Typical Diffusion Pumped High Vacuum System
Read more

Society of Vacuum Coaters - Detailed SVC Course Syllabus

V-201 High Vacuum System Operation. ... be able to explain the operation of diffusion, ... operating principles of a typical diffusion pumped system are ...
Read more

Inside A Vacuum Diffusion Pump - ChemAssociates

Inside A Vacuum Diffusion Pump ... that the molecules of the pumped gas penetrate some distance ... Figure 4 Vacuum diffusion pumps in operation, ...
Read more

Varian, Inc. Vacuum Technologies - Agilent

have simplified operation and ... Diffusion Pump Typical Applications 4 ... Varian, Inc. Vacuum Technologies ...
Read more

Chapter 7: Oil Vapor Diffusion Pumps - Las Positas College

Chapter 7: Oil Vapor Diffusion Pumps ... Theory Of Operation Diffusion pumps are ... Figure 7.1 Configuration of traps and baffles used on diffusion pumped ...
Read more

Description of a Basic Vacuum System

Description of a Basic Vacuum ... vac valve must be closed during this operation if ... opened so that back of the diffusion pump and be pumped down.
Read more

The First Five Years - Bell Jar

The First Five Years 1992-1996 the Bell Jar ... Complete Dummies Guide to the Operation of a Typical Diffusion 1-23 Pumped High Vacuum System Manometers 1-26
Read more

Chapter 6 Vacuum Pumps - RIT - People

6.1 Introduction to Vacuum Pumps . . . . . . . . . . . . . . . . . . . . . . . . 4 ... 6.8 Some Typical Systems ... operation, their ...
Read more

Typical Laser power from a diffusion cooled tube 50Wm ...

Typical Laser power from a diffusion cooled tube 50Wm Laser Power P l 06x wd x from MECHANICAL 6023 at Indian Institute of Technology, Kharagpur
Read more