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Published on January 2, 2008

Author: Dennison

Source: authorstream.com

Non-hysteretic positioner for nano-lithography and cryogenic in situ adjustable nano-junctions :  Non-hysteretic positioner for nano-lithography and cryogenic in situ adjustable nano-junctions Benjamin Thomsen and Jesper Mygind* Department of Physics, B309, Technical University of Denmark, Lyngby Denmark. *E-mail: myg@fysik.dtu.dk Work supported in part by INTAS projects 01-0809 and 01-0686, Danish Natural Science Foundation, and the Hartmann Foundation. Overview:  Overview Motivation direct writing of nano devices (Al or Ti films on Si @ 300K) cryogenic in situ adjustable nano-junctions millikelvin operation (KelvinOx 3He/4He fridge) The integrated nano-positioner prototype scanner head (AFM, STM, SNOM), optical guides, focusing lens sample positioner (X-Y translator, Z-translator) working principle, friction motor, step-length, non-hysteretic ) Veeco/Digital controller and the PC/LabView motor driver Results, Z-translator, X-Y translator Conclusion and outlook writing of nano devices optical interferometric coarse X-Y-Z position, closed loop operation 32 mm dia miniature nano-positioner Slide3:  Schematic of integrated cryogenic positioner AFM , STM or SNOM head with X-Y-Z tube scanner Sample table with thermometers and bias connections X-Y-translator body Z-motor body Z-motor with sapphire prism, 4 steel balls and 4 shear stacks Sample X-Y-motor with 3 steel balls and 6 “legs” Spring leaf adjustment for X-Y motor Input /output optical fibers Slide4:  The Z-positioner 2 shear actuators 4 steel balls Sapphire prism Old principle: friction motor with 6 shear actuators New positioner: steel balls/graphite gliders, variable step length Slide5:  Working principle of friction motor Problems with uneven friction (only 4 actuators are shown) Slide6:  Friction-motor, working principle one leg moves forward while all other legs stand All legs and the rod move backwards One can stop here ! Slide7:  The four curves correspond to two translations in both directions. The voltage ramp used to step the cylinder starts at ± 200 V, decreasing to ± 75 V, where the movement has stopped, and then increasing again to ± 200 V. Z-motor with sapphire rod positive negative Slide8:  Novel working principle for both Z- and X-Y-translator Slide9:  One leg for the novel translator with both X- and Y-motion polished glued to brass base electrodes shown in blue and red Slide10:  X-Y translator with two sets of 3 legs The 2 x 3 legs are placed equidistantly on a circle. Each leg has an X-Y shear stack and a multilayer Z-stack Working principle: The quartz plane, which is pressed against the 3 (red) steel balls, is translated in the X-Y plane by the alternating action of the two sets (green and blue) of 3 legs Slide11:  X-Y-motor assembled Mirror for optical interferometer Quartz plate 6 piezo legs Top plate Body Leaf spring Slide12:  X-Y-motor dismantled Quartz disk 3 steel balls 6 piezo legs body Top part with quartz disk Leaf spring Slide13:  - 200V +200V 0V  200 V  X = Y = 1300 nm Fringe pattern from optical interferometer Slide14:  Writing of nano structures in 2nm thick Ti-film Conclusion and outlook:  Conclusion and outlook Cryogenic AFM head is being tested Optical interferometric coarse X-Y-Z position with closed loop operation 32mm dia miniature nano-positioner Has been achieved The cryogenic Z-motor with STM head operates with atomic resolution The X-Y-motor prototype works well at 300K Writing of nano devices at 300K works Future work

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