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Published on January 11, 2008

Author: Tibald

Source: authorstream.com

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Glass & Plastic MEMS:  Glass & Plastic MEMS Young-Tae Lee Contents:  Contents Bio-MEMS Glass MEMS Plastic MEMS Microstereolithography Pump & Liquid analyzer MEMS Technology:  MEMS Technology Bulk micromachining Surface micromachining LIGA Technology Deep RIE Plastic MEMS Stereolithography Bio-MEMS :  Bio-MEMS Bio-MEMS refers to the areas where, by fabricating micro and nano-scale devices and systems, engineering can help solve problems in biological sciences, (ii) micro and nano-scale phenomenon can be studied using micro-fabricated structures, and (iii) concepts from biology can help solve important problems in engineering. MEMS Market:  MEMS Market Bio-MEMS:  Bio-MEMS Lab-on-a chip Biochips DNA chips -TAS(total analysis system) Smart drug delivery Bio-sensor …….. Lab-on-a Chip:  Lab-on-a Chip Lab-on-a Chip :  Lab-on-a Chip Lab-on-a Chip:  Lab-on-a Chip Agilent i-stat Micro-pump:  Micro-pump Mechanical pump Piezoelectric Electrostatic Thermopneumatic Magnetic Non-mechanical pump Electrohydrodynamic (EHD) Magnetohydrodynamic (MHD) Piezoelectric Pump:  Piezoelectric Pump Electrostatic Pump:  Electrostatic Pump Electro-mechanical coupling effect Electrostatic force Thermopneumatic Pump:  Thermopneumatic Pump Magnetic Pump:  Magnetic Pump EHD(electrohydrodynamic) Pump:  EHD(electrohydrodynamic) Pump MHD(magnetohydrodynamic) Pump:  MHD(magnetohydrodynamic) Pump Micro-valve:  Micro-valve Movable valve Electrostatic Magnetic SMA(shape memory alloy) Non-movable Valve Diffuser/nozzle Magnetic Valve:  Magnetic Valve MicroSystems and BioMEMS Lab at University of Cincinnati Diffuser/nozzle:  Diffuser/nozzle Micro-mixer:  Micro-mixer Active mixer Static mixer Active mixer:  Active mixer Static mixer:  Static mixer Micro-reactor:  Micro-reactor Glass MEMS:  Glass MEMS Glass Drilling Method Anodic Bonding Glass Etching Microstructure Using Glass Glass MEMS:  Glass MEMS Glass Drilling Method:  Glass Drilling Method Laser Sand Blaster RIE(Reactive Ion Etching) Electro-chemical Discharge Drilling Electro-chemical Discharge Drilling:  Electro-chemical Discharge Drilling Glass Drilling:  Glass Drilling Anodic bonding:  Anodic bonding Packaged Microstructure (Tohoku University, Esashi Lab.) :  Packaged Microstructure (Tohoku University, Esashi Lab.) Glass Etching:  Glass Etching Wet etching HF based solution(photoresisit mask: 5∼10㎛) HF/NH4F HF/H3PO4( glass containing aluminum oxide) Dry etching RIE(reactive ion etching) CHF3/Ar, CF4/O2, CF4/Ar SF6(thick nickel mask) Glass Wet-etching Using HF/H3PO4:  Glass Wet-etching Using HF/H3PO4 Glass containing aluminum oxide Corning #7740 (2.3%) Hoya SD2 glass (20%) Phosphoric acid(H3PO4) – Etchant for aluminum oxide Delft University of Technology, DIMES Deep RIE of Pyrex glass using SF6 Plasma (Tohoku University, Esashi Lab.) :  Deep RIE of Pyrex glass using SF6 Plasma (Tohoku University, Esashi Lab.) Deep RIE of Pyrex glass, quartz, PZT (lead zirconium titanate) and SiC (silicon carbide) using thick nickel mask Powderblasted Glass Chips (MESA+ Research Institute, University of Twente) :  Powderblasted Glass Chips (MESA+ Research Institute, University of Twente) Powderblasted Glass Chips (MESA+ Research Institute, University of Twente):  Powderblasted Glass Chips (MESA+ Research Institute, University of Twente) 500㎛ depth channel Cross-section of powder blasted channels Microstructure Using Glass:  Microstructure Using Glass Agilent tech. Caliper tech. Plastic MEMS:  Plastic MEMS Why plastic MEMS? Soft Lithography Micro-transfer Molding(TM) Micro-molding in Capillaries (MIMIC) Replica Molding(REM) Hot embossing Plastic injection molding technique Plastic Biochip (Digital Bio Technology, Korea) Bio-detection System (MicroSystems and BioMEMS Lab at University of Cincinnati) Why Plastic MEMS ?:  Why Plastic MEMS ? Simple and low coat fabrication Low weight, high strength Good optical transparency Biocompatibility Soft Lithography (elastomeric stamp):  Soft Lithography (elastomeric stamp) Thick photoresist SU-8,10 ( ~50 µm thick) Si surface after etching University of Washiton CAM Lab. Soft Lithography:  Soft Lithography Micro-transfer Molding(TM) Micro-molding in Capillaries(MIMIC) Replica Molding(REM) Hot embossing Plastic injection molding technique Micro-transfer Molding(TM):  Micro-transfer Molding(TM) In µTM, the recessed regions of a mold are filled with a liquid or prepolymer, and the filled mold is then brought into contact with a substrate. µTM allows formation of both interconnected and isolated microstructures. Micro-molding in Capillaries (MIMIC):  Micro-molding in Capillaries (MIMIC) In MIMIC, a liquid prepolymer or other fluid capable of subsequent solidification wicks spontaneously by capillary action into the network of channels formed by a conformal contact between a mold and a substrate. Replica Molding(REM):  Replica Molding(REM) In REM, a liquid prepolymer is directly cast again as a mold. After curing the prepolymer, the mold is removed, leaving a polymer micro- or nano-structure on the surface. REM is remarkable for its simplicity for generating nanostructures (>30 nm) or polymers with a resolution of a few nanometers. Hot embossing (Laboratory for Micro- and Nanotechnology Paul Scherrer Institut):  Hot embossing (Laboratory for Micro- and Nanotechnology Paul Scherrer Institut) Plastic injection molding technique (MicroSystems and BioMEMS Lab at University of Cincinnati) :  Plastic injection molding technique (MicroSystems and BioMEMS Lab at University of Cincinnati) Plastic Biochip (Digital Bio Technology, Korea):  Plastic Biochip (Digital Bio Technology, Korea) Cell-count C-BOX RBC filter-RBC hemocytometer Dilution palette Absorbance tester Bio-detection System (MicroSystems and BioMEMS Lab at University of Cincinnati) :  Bio-detection System (MicroSystems and BioMEMS Lab at University of Cincinnati) Microstereolithography:  Microstereolithography Microstereolithography?:  Microstereolithography? Microstereolithography:  Microstereolithography Stereolithography?:  Stereolithography? Advantage:  Advantage Microstructure (Ikuta Lab., Japan):  Microstructure (Ikuta Lab., Japan) Microturbine Microgear train Microcoil Multi-polymer IH Process (Ikuta Lab., Japan):  Multi-polymer IH Process (Ikuta Lab., Japan) Optical waveguides High-speed Two-photon Microstereolithography (Ikuta Lab., Japan) :  High-speed Two-photon Microstereolithography (Ikuta Lab., Japan) Hybrid IH Process (Ikuta Lab., Japan):  Hybrid IH Process (Ikuta Lab., Japan) Biochemical IC Chip Set Family (Ikuta Lab., Japan):  Biochemical IC Chip Set Family (Ikuta Lab., Japan) Biochemical IC Chip (Ikuta Lab., Japan):  Biochemical IC Chip (Ikuta Lab., Japan) Micro-Electrophoretic Chip (Sankyo Co., Ltd., Japan):  Micro-Electrophoretic Chip (Sankyo Co., Ltd., Japan) Integral Microstereolithography Principle(EPFL):  Integral Microstereolithography Principle(EPFL) Microstructure (EPFL):  Microstructure (EPFL) Microstereolithography:  Microstereolithography Pump & Liquid analyzer Young-Tae Lee Micro-pump:  Micro-pump Mechanical pump Piezoelectric Electrostatic Thermopneumatic Magnetic Non-mechanical pump Electrohydrodynamic (EHD) Magnetohydrodynamic (MHD) Pump structure:  Pump structure Fabrication process:  Fabrication process Photograph of the pump:  Photograph of the pump Diffuser/nozzle:  Diffuser/nozzle Pressure Head Difference:  Pressure Head Difference Supply voltage: 200V, 140Hz Pressure head difference:  Pressure head difference Frequency response:  Frequency response Flow rate:  Flow rate Liquid analyzer:  Liquid analyzer Simulation results:  Simulation results Chamber Mixer Pump Chamber Channel Mixer Photograph of the liquid analyzer:  Photograph of the liquid analyzer Photograph of the mixer:  Photograph of the mixer Characteristics of the liquid analyzer:  Characteristics of the liquid analyzer DI water(100ml)+0.9%NaCl(x liter) Circulation and Mixing Operation:  Circulation and Mixing Operation Characteristics of the Mixing Operation:  Characteristics of the Mixing Operation Electrolysis Phenomenon:  Electrolysis Phenomenon 감사합니다!:  감사합니다! 이 영태 Tel: 054-820-5744 E-mail: ytlee@andong.ac.kr

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